JPH0452955Y2 - - Google Patents
Info
- Publication number
- JPH0452955Y2 JPH0452955Y2 JP818988U JP818988U JPH0452955Y2 JP H0452955 Y2 JPH0452955 Y2 JP H0452955Y2 JP 818988 U JP818988 U JP 818988U JP 818988 U JP818988 U JP 818988U JP H0452955 Y2 JPH0452955 Y2 JP H0452955Y2
- Authority
- JP
- Japan
- Prior art keywords
- heater element
- insulator
- heater
- bent portion
- hole
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012212 insulator Substances 0.000 claims description 28
- 238000005452 bending Methods 0.000 claims description 4
- 238000002485 combustion reaction Methods 0.000 claims description 3
- 230000005611 electricity Effects 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000009466 transformation Effects 0.000 description 1
Landscapes
- Resistance Heating (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP818988U JPH0452955Y2 (en]) | 1988-01-27 | 1988-01-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP818988U JPH0452955Y2 (en]) | 1988-01-27 | 1988-01-27 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01113989U JPH01113989U (en]) | 1989-07-31 |
| JPH0452955Y2 true JPH0452955Y2 (en]) | 1992-12-11 |
Family
ID=31213845
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP818988U Expired JPH0452955Y2 (en]) | 1988-01-27 | 1988-01-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0452955Y2 (en]) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5381879B2 (ja) * | 2010-04-08 | 2014-01-08 | 住友電気工業株式会社 | ウェハ加熱用ヒータユニットおよびそれを搭載した半導体製造装置 |
-
1988
- 1988-01-27 JP JP818988U patent/JPH0452955Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01113989U (en]) | 1989-07-31 |
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